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二氯硅烷

二氯硅烷
Ball and stick model of dichlorosilane
Spacefill model of dichlorosilane
IUPAC名
Dichlorosilane[1]
别名 二氯甲硅烷
识别
缩写 DCS
CAS号 4109-96-0  checkY
PubChem 61330
ChemSpider 55266
SMILES
 
  • Cl[SiH2]Cl
UN编号 2189
EINECS 223-888-3
RTECS VV3050000
MeSH dichlorosilane
性质
化学式 SiH
2
Cl
2
摩尔质量 101.007 g mol−1 g·mol⁻¹
外观 无色气体
密度 1.22 g cm−3
熔点 −122 °C(151 K)
沸点 8 °C(281.4 K)
溶解性 (反应)
蒸氣壓 167.2 kPa (at 20 °C)
热力学
ΔfHm298K −320.49 kJ mol−1
S298K 286.72 J K−1 mol−1
危险性
警示术语 R:R12, R14, R26, R35
安全术语 S:S26, S36/37/39, S45, S53, S60
欧盟分类 极易燃 F+ 剧毒 T+
GHS危险性符号
《全球化学品统一分类和标签制度》(简称“GHS”)中易燃物的标签图案《全球化学品统一分类和标签制度》(简称“GHS”)中腐蚀性物质的标签图案《全球化学品统一分类和标签制度》(简称“GHS”)中有毒物质的标签图案
GHS提示词 DANGER
H-术语 H220, H250, H280, H314, H330
P-术语 P210, P261, P305+351+338, P310, P410+403
NFPA 704
4
4
2
 
爆炸極限 4.1–99%
相关物质
相关化合物 氯硅烷
三氯硅烷
四氯化硅
相关化学品 二氯甲烷
若非注明,所有数据均出自标准状态(25 ℃,100 kPa)下。

二氯硅烷,缩写DCS,是一种无机化合物,化学式为H2SiCl2

制备

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二氯硅烷可由硅烷氯化氢按化学计量比在三氯化铝催化剂的存在下反应制备:[2]

它也可以利用三氯硅烷来制备:[3]

2 SiHCl3 ⇔ SiCl4 + SiH2Cl2

化学性质

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二氯硅烷遇水水解,产生多聚硅氧烷(-H2Si-O-)n;和氨反应氨解,产生(-H2SiNH-)n[2]

用途

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二氯硅烷可以用来做微电子里的半导体层的起始物料,其优点是它在较低温度可以分解,并且有较高的硅晶体生长速率。[3]

安全风险

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二氯硅烷是一种化学性质活泼的气体,在空气中可以迅速水解并自燃。它的毒性也很大,利用它的任何实验都需要有保护性措施。[4]其安全风险还包括皮肤和眼睛的刺激与吸收。[5]

参考资料

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  1. ^ Nchem.403-comp13 - Compound Summary. PubChem Compound. USA: National Center for Biotechnology Information. Identifiers and Related Records. 27 March 2005 [30 November 2011]. 
  2. ^ 2.0 2.1 郝润蓉,方锡义,钮少冲. 《无机化学丛书》第三卷 碳 硅 锗 分族. 北京:科学出版社, 2011. P142. 2.3 卤代硅烷(SiHnX4-n). ISBN 978-7-03-030549-7
  3. ^ 3.0 3.1 Vorotyntsev, V., Mochalov, G., Kolotilova, M., Kinetics of Dichlorosilane Separation from a Mixture of Chlorosilanes by Distillation Using a Regular Packing, Theoretical Foundations of Chemical Engineering, 38(4), 355-359
  4. ^ Vorotyntsev, V., Mochalov, G., Kolotilova, Volkova, E., Gas-Chromatographic and Mass-Spectrometric Determination of Impurity Hydrocarbons in Organochlorine Compounds and Dichlorosilane, Journal of Analytical Chemistry, 61(9), 883-888.
  5. ^ Praxair Material Safety Data Sheet (2007)
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二氯硅烷
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